Automated POCl3 Refill System / PVRefill

Enhancing safety and reducing costs

Features

• Any combination of each units
• Supply chemical from large container to small container in diffusion tool
  • Elimination of production downtime
  • Reducing the frequency of container replacements
• Automatic container replacements for PVRefill
  • Enhanced safety realized by automatic purge process
• Liquid level sensor allows you to use up POCl3 in large container
  • Less residual chemicals, less costs
• Suitable piping materials for corrosive POCl3
• Residual chemicals monitoring function for small container enables automatic refill

Safety

• Built-in leak detector
• Various interlock functions
• Coaxial piping system
• Protective function for large container (optional)

Total Systems