Liquid Chemical Delivery System for Organometallics / MOsupply

Minimizing the frequency of bubbler replacements

Features

• Reducing residual chemicals
• Reducing the frequency of container replacements
• Auto cycle purge and Leak check
• Single tank system
• Replace head space gas automatically to process gas
• Stable supply of high purity chemicals

Operation

• TFT touch panel
• Interlock function triggered by an external signal

Safety

• Smoke detector and heat sensor
• Coaxial piping system (optional)
• Chemical containment
• Fire damper

SAFC Hitech products

• We have exclusively offered the products of SAFC Hitech (former Epichem) in Japan over the years. Click here to link to the list of the recommended products for a perfect match with MOsupply.

Total Systems